Umswakamo yisimo esivamile sokulawula imvelo ekusebenzeni kwezindlu ezihlanzekile. Inani eliqondiwe lomswakama ohlobene egumbini elihlanzekile le-semiconductor lilawulwa ukuthi libe sebangeni elingu-30 kuya ku-50%, okuvumela iphutha libe phakathi kwebanga elincane elingu-±1%, njengendawo ye-photolithographic - noma libe lincane nakakhulu endaweni yokucubungula i-ultraviolet (DUV). - Kwezinye izindawo, ungakwazi ukuphumula ku-±5%.
Ngoba umswakama ohlobene unezici ezimbalwa ezingase zibe nomthelela ekusebenzeni okuphelele kwegumbi elihlanzekile, okuhlanganisa:
● ukukhula kwamagciwane;
● Ibanga lokunethezeka izisebenzi ezizizwa ezingeni lokushisa elivamile;
● Ishaja engashintshi iyavela;
● ukugqwala kwensimbi;
● Ukujiya komhwamuko wamanzi;
● ukucekelwa phansi kwe-lithography;
● Ukumuncwa kwamanzi.
Amagciwane nokunye ukungcola kwebhayoloji (isikhunta, amagciwane, isikhunta, izibungu) angaphindaphindeka endaweni enomswakama ohlobene nongaphezu kuka-60%. Ezinye izitshalo zingakhula lapho umswakama ohlobene udlula ama-30%. Uma umswakama ohlobene uphakathi kuka-40% no-60%, imiphumela yamagciwane kanye nezifo zokuphefumula zingancishiswa.
Umswakama ohlobene ebangeni elingama-40% ukuya ku-60% nawo uyibanga elinesizotha lapho abantu bezizwa bekhululekile. Umswakama owedlulele ungenza abantu bazizwe bedangele, kuyilapho umswakama ongaphansi kuka-30% ungenza abantu bazizwe bomile, beshaywe umoya, bengakhululeki ekuphefumuleni kanye nokungakhululeki ngokomzwelo.
Umswakama ophezulu empeleni unciphisa ukuqoqwa kwe-static charge ebusweni bekamelo elihlanzekile - lokhu kuwumphumela oyifunayo. Umswakamo ophansi ufaneleka kakhulu ekuqongeleleni inkokhiso kanye nomthombo ongase ube yingozi wokukhishwa kwe-electrostatic. Uma umswakama ohlobene udlula ama-50%, i-static charge iqala ukuhlakazeka ngokushesha, kodwa lapho umswakama ohlobene ungaphansi kuka-30%, ungaqhubeka isikhathi eside ku-insulator noma endaweni engenalutho.
Umswakama ohlobene phakathi kuka-35% no-40% ungaba ukuyekethisa okwanelisayo, futhi amagumbi okuhlanza ama-semiconductor ngokuvamile asebenzisa izilawuli ezengeziwe ukuze akhawulele ukunqwabelana kokushaja okumile.
Ijubane lokusabela kwamakhemikhali amaningi, okuhlanganisa nenqubo yokugqwala, lizokhula njengoba umswakama ohlobene ukhula. Zonke izindawo ezivezwe emoyeni ezizungeze igumbi elihlanzekile zimbozwa ngokushesha okungenani nge-monolayer eyodwa yamanzi. Uma lezi zindawo zakhiwe ngensimbi encane engasabela ngamanzi, umswakama ophezulu ungasheshisa ukusabela. Ngenhlanhla, ezinye izinsimbi, ezifana ne-aluminium, zingakha i-oxide evikelayo ngamanzi futhi ivimbele ukusabela okuqhubekayo kwe-oxidation; kodwa elinye icala, elifana ne-copper oxide, alivikeli, ngakho-ke Ezindaweni ezinomswakama ophezulu, izindawo zethusi zingenwa kalula ukugqwala.
Ngaphezu kwalokho, endaweni enomswakama ophezulu, i-photoresist iyanwetshwa futhi ithuthuke ngemva komjikelezo wokubhaka ngenxa yokumuncwa komswakama. Ukunamathela kwe-Photoresist nakho kungathinteka kabi ngomswakama ophakeme wesihlobo; umswakama ophansi ohlobene (cishe u-30%) wenza ukunamathela kwe-photoresist kube lula, ngisho nangaphandle kwesidingo se-polymeric modifier.
Ukulawula umswakama ohlobene ekamelweni elihlanzekile le-semiconductor akunangqondo. Kodwa-ke, njengoba isikhathi sishintsha, kungcono ukubukeza izizathu nezisekelo zemikhuba evamile, eyamukelwa ngokuvamile.
Umswakama ungase ungabonakali ikakhulukazi ngokunethezeka kwethu komuntu, kodwa ngokuvamile unomthelela omkhulu ohlelweni lokukhiqiza, ikakhulukazi lapho umswakama uphezulu, futhi umswakama uvame ukulawula okubi kakhulu, yingakho Ekulawuleni izinga lokushisa nomswakama ekamelweni elihlanzekile, umswakama ukhethwa kakhulu.
Isikhathi sokuthumela: Sep-01-2020